Evolution of LeTID Defects in Industrial mc-Si Wafers —— Dependency of Wafer Positions in Brick and Temperature
文件格式:pdf
匿名用户 2021-02-18
文件描述
1. Background on mc-Si LeTID
2. Effect of wafer position and temperature on LeTID
3. Mitigating LeTID in mass production
4. Conclusion